Type

Series/CAD

Vane
type

Size

Rotating angle

Single

Double

High
precision

1. MSUA 

Single,
Double

1,3,7,20

90º,180º

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Basic
type

1. MSUB 

90º

Features

Integration of a table and rotary actuator

Angle adjustable, ±5º at each rotation end (Double: ±2.5º)

Table deflection accuracy: 0.03 mm or less (MSUA)

Connection port position: Side ported and axial ported selectable (When a switch is installed, side ported only.)

Possible to move the auto switch mounting position as desired