Model/CAD

Flow characteristics

Power
consumption
(W)

Available in
vacuum
applications

2→3(A→R)

C[dm3/(s·bar)]

b

Cv

1. VQZ100 

1.0

0.35

0.25

0.35 (Standard)
0.9 (High pressure
type, High speed
response type)

-100 kPa

1. VQZ200 

3.0

0.40

0.80

1. VQZ300 

4.1

0.36

1.0

Features

• External pilot specification can be used for vacuum applications.
• Allows mounting on aluminum body manifold or DIN rail