Series/CAD

Fluid

Set pressure

Flow range L/min (ANR)

1. LLB3 

Clean air
N2gasNOTE)

0.05 to 0.4 MPa

5 to 100

1. LLB4 

50 to 500

Features

Clean equipment modularized (Reduction of piping labor/Space-saving)

Clean air is easily available.

Nominal filtration rating: 0.01 μm (Filtration efficiency 99.99%)

Wetted parts: Grease-free, Silicon-free

Assembled in a clean room, shipped and packed in a duplicate package

24 combinations available