Type

Series/CAD

Operating pressure

Filtration

Cartridge type disc

SFA100/200/300 

Max.1.0 MPa
(Vacuum: 1.3 x 10-6kPa)

0.01 μm
(Filtration efficiency
99.99%)

Cartridge type straight

1. SFB100 

Max.1.0 MPa
(Vacuum: 1.3 x 10-6kPa)

Features

Cartridge type allows element replacement.

Disposable type straight

1. SFB300 

Max.15 MPa
(Vacuum: 1.3 x 10-6kPa)

0.01 μm
(Filtration efficiency
99.99%)

Disposable type
multiple disc

1. SFC100 

Max.1.8 MPa
(Vacuum: 1.3 x 10-6kPa)

Features

Compact disposable type for semiconductor industry